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Leakage and Vacuum Test
Leakage
~ Mass Spectrometer
~ Varian Portatest II
~ He to 1 x           SCCS

~ Mass Flow
~ Flow section, sharp edge orifice

~Digital Flow Meters
~1 SCCM to 400 SLM

~Positive Displacement/ Fluid Colletors
~ Collection cylinders to 2000 cc
Vacuum
~ Capability to          torr

~ Chamber:
~ Diameter: 24 inches
~ Height: 30 inches

~Pass through for electrical and fluid supply