Leakage and Vacuum Test
Leakage
~ Mass Spectrometer
~ Varian Portatest II
~ He to 1 x SCCS
~ Mass Flow
~ Flow section, sharp edge orifice
~Digital Flow Meters
~1 SCCM to 400 SLM
~Positive Displacement/ Fluid Colletors
~ Collection cylinders
to 2000 cc
Vacuum
~ Capability to torr
~ Chamber:
~ Diameter: 24 inches
~ Height: 30 inches
~Pass through
for electrical and fluid supply