| |
| Leakage
and Vacuum Test |
|
Leakage
 |
Mass Spectrometer
 |
Varian Portatest II |
|
He to 1 x 10-8 SCCS |
|
|
Mass Flow
|
Flow Section, Sharp Edge Orifice |
|
|
Digital Flow Meters
|
1 SCCM to 400 SLM |
|
|
Positive Displacement/ Fluid Collectors
|
Collection Cylinders to 2000 cc |
|
|
|
|
|
|
|
Vacuum
|
Capability: to 10-5 torr |
|
Chamber:
|
Diameter: 24 inches |
|
Height: 30 inches
|
|
|
Pass Through for
Electrical and Fluid Supply |
|
|
|